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C-Scan

Deconvolution also provides benefits in the analysis of C-scan data. The broad C-scan for the steplap joint obtained using the raw data appears on the left. The strong reflections from the defects are readily apparent but appear simply as more intense positive (yellow) regions in the image. Following deconvolution of the traces in the Z-scan, however, the reversal of polarity (blue) of the reflections from the defects is clear in the image on the right. This polarity reversal is a highly useful indicator of the presence of a defect.


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